Fabrication of nano-patterns of photoresist by ultraviolet lithography and oxygen plasma

Cheng, E; Tang, SZ; Zou, HL; Zhang, ZY; Wang, Y

Zhang, ZY (corresponding author), Hebei Univ Technol, Sch Mech Engn, Tianjin 300401, Peoples R China.

JOURNAL OF ELECTRICAL ENGINEERING-ELEKTROTECHNICKY CASOPIS, 2020; 71 (5): 359

Abstract

Nanofluidic devices with two-dimensional nanochannels have many applications in biology and chemistry, however, it is still a challenge to develop a l......

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