Enhanced ablation efficiency for silicon by femtosecond laser microprocessing with GHz bursts in MHz bursts(BiBurst)

Caballero-Lucas, F; Obata, K; Sugioka, K

Sugioka, K (通讯作者)，RIKEN, Ctr Adv Photon, 2-1 Hirosawa, Wako, Saitama 3510198, Japan.

INTERNATIONAL JOURNAL OF EXTREME MANUFACTURING, 2022; 4 (1):

Abstract

Full Text Link


Links

期刊讨论 | 中国SCI论文 | 期刊主页 | 投稿经验 | 杂志官网 | 投稿链接 | 作者需知 | PMC链接 | Pubmed全文检索