Closed-loop MOEMS accelerometer

Taghavi, M; Abedi, A; Parsanasab, GM; Rahimi, M; Noori, M; Nourolahi, H; Latifi, H

Parsanasab, GM (通讯作者)，Shahid Beheshti Univ, Fac Elect Engn, Integrated Photon Lab, Tehran 1983963113, Iran.;Parsanasab, GM (通讯作者)，Shahid Beheshti Univ, Fac Elect Engn, Tehran 1983963113, Iran.

OPTICS EXPRESS, 2022; 30 (12): 20159

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