Transferrable single crystalline 4H-SiC nanomembranes

Kim, M; Seo, JH; Zhao, DY; Liu, SC; Kim, K; Lim, K; Zhou, WD; Waksc, E; Ma, ZQ

Ma, ZQ (reprint author), Univ Wisconsin, Dept Elect & Comp Engn, 1415 Johnson Dr, Madison, WI 53706 USA.

JOURNAL OF MATERIALS CHEMISTRY C, 2017; 5 (2): 264

Abstract

In this work, we demonstrate a transferrable single crystalline 4H-SiC nanomembrane (SiC NM) released from a SiC-on-insulator (SiCOI) wafer. High reso......

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