Fourier ptychographic topography

Wang, H; Zhu, JB; Sung, J; Hu, GR; Greene, J; Li, YZ; Park, S; Kim, W; Lee, M; Yang, YS; Tian, L

Tian, L (通讯作者),Boston Univ, Dept Elect & Comp Engn, Boston, MA 02215 USA.;Tian, L (通讯作者),Boston Univ, Dept Biomed Engn, Boston, MA 02215 USA.

OPTICS EXPRESS, 2023; 31 (7): 11007

Abstract

Topography measurement is essential for surface characterization, semiconductor metrology, and inspection applications. To date, performing high-throu......

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