TIP-ENHANCED NEARFIELD GRAYSCALE THERMAL NANOLITHOGRAPHY

Lee, W; Zhang, SQ; Zhou, ZT; Tao, TH

Lee, W (reprint author), Univ Texas Austin, Austin, TX 78712 USA.

2018 IEEE MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2018; (): 440

Abstract

We present tip-enhanced nearfield grayscale thermal nanolithography (TNTN), a closed-loop nanofabrication technique capable of patterning hierarchical......

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