Fabrication of Templates for Metallic Nanoantennas by STED-DLW Lithography

Zvagelsky, RD; Chubich, DA; Kolymagin, DA; Pisarenko, AV; Vitukhnovsky, AG

Chubich, DA (reprint author), State Univ, Moscow Inst Phys & Technol, 9 Inst Skiy Lane, Dolgoprudnyi 141700, Moscow Region, Russia.

XVI INTERNATIONAL CONFERENCE ON LUMINESCENCE AND LASER PHYSICS DEVOTED TO THE 100TH ANNIVERSARY OF IRKUTSK STATE UNIVERSITY, 2019; 2069 ():

Abstract

The authors experimentally realized the idea of STED-DLW lithography and picked writing parameters for the efficient fabrication of polymeric nanostru......

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