Numerical and theoretical modeling of the sheath upstream of ion optics: sheath structure transition and its effect on the beam divergence

Li, HL; Yuan, XC; Yang, JY; Sun, AB

Sun, AB (corresponding author), Xi An Jiao Tong Univ, State Key Lab Elect Insulat & Power Equipment, Sch Elect Engn, Xian 710049, Shaanxi, Peoples R China.

PLASMA SOURCES SCIENCE & TECHNOLOGY, 2021; 30 (7):

Abstract

The grasp of the sheath characteristics is fundamental to evaluate the extraction capabilities of ion optics and accommodate the wide application of i......

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