Molecular dynamics simulation of argon cluster ion collisions with argon atoms

Sirotkin, VV

Sirotkin, VV (corresponding author), Russian Technol Univ, Moscow, Russia.; Sirotkin, VV (corresponding author), RAS, Inst Microelect Technol & High Pur Mat, Chernogolovka, Russia.

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2020; 476 (): 14

Abstract

The process of collisions of accelerated argon cluster ions with residual gas atoms was analyzed by molecular dynamic simulation. The cluster ions und......

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