Modeling of fiber-coupled confocal and interferometric confocal distance sensors

Siebert, M; Hagemeier, S; Pahl, T; Serbes, H; Lehmann, P

Hagemeier, S; Pahl, T (通讯作者)，Univ Kassel, Fac Elect Engn & Comp Sci, Measurement Technol Grp, Wilhelmshoeher Allee 71, D-34121 Kassel, Germany.

MEASUREMENT SCIENCE AND TECHNOLOGY, 2022; 33 (7):

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