Post-growth modulation doping by ion implantation

Chiu, PY; Lidsky, D; Chuang, Y; Su, YH; Li, JY; Harris, CT; Lu, TM

Lu, TM (corresponding author), Sandia Natl Labs, POB 5800, Albuquerque, NM 87185 USA.; Lu, TM (corresponding author), Sandia Natl Labs, Ctr Integrated Nanotechnol, Albuquerque, NM 87123 USA.

APPLIED PHYSICS LETTERS, 2020; 117 (26):