High quality factor RF MEMS tunable capacitor

Hailu, Z

Hailu, Z (reprint author), Ryerson Univ, Mech & Ind Engn, Toronto, ON, Canada.

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2017; 23 (8): 3719

Abstract

This paper presents the design of a tunable capacitor that integrates two vertical comb-drive tunable capacitors and a parallel plate tunable capacito......

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