Stress Relaxation Behaviors of Monocrystalline Silicon Coated with Amorphous SiO2 Film: A Molecular Dynamics Study

Chen, J; Fang, L; Zhang, M; Peng, WX; Sun, K; Han, J

Fang, L (corresponding author), Xi An Jiao Tong Univ, State Key Lab Mech Behav Mat, Xian 710049, Peoples R China.; Fang, L (corresponding author), Xiamen Univ, Tan Kah Kee Coll, Sch Mech & Elect Engn, Zhangzhou 363105, Peoples R China.

ACTA MECHANICA SOLIDA SINICA, 2021; 34 (4): 506

Abstract

Long-lasting constant loading commonly exists in silicon-based microelectronic contact, as well as the chemical mechanical polishing area. In this wor......

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