Replacing libraries in scatterometry

Madsen, JSM; Jensen, SA; Nygard, J; Hansen, PE

Madsen, JSM (reprint author), DFM AS, DK-2970 Horsholm, Denmark.; Madsen, JSM (reprint author), Univ Copenhagen, Niels Bohr Inst, DK-2100 Copenhagen, Denmark.

OPTICS EXPRESS, 2018; 26 (26): 34622

Abstract

Diffraction gratings have a wide array of applications in optics, diagnostics, food science, sensing, and process inspection. Scattering effects from ......

Full Text Link