Review of Electrothermal Micromirrors-MedSci.cn

Review of Electrothermal Micromirrors

Tang, Y; Li, JH; Xu, LX; Lee, JB; Xie, HK

Xu, LX (通讯作者)，Beijing Inst Technol, Sch Mechatron Engn, Beijing 100081, Peoples R China.;Xie, HK (通讯作者)，Beijing Inst Technol, Sch Integrated Circuits & Elect, Beijing 100081, Peoples R China.;Xie, HK (通讯作者)，BIT Chongqing Ctr Microelect & Microsyst, Chongqing 400030, Peoples R China.