Comprehensive understanding of the ignition process of a pulsed capacitively coupled radio frequency discharge: the effect of power-off duration

Wang, XY; Liu, JR; Liu, YX; Donko, Z; Zhang, QZ; Zhao, K; Schulze, J; Wang, YN

Liu, YX (corresponding author), Dalian Univ Technol, Sch Phys, Minist Educ, Key Lab Mat Modificat Laser Ion & Electron Beams, Dalian 116024, Peoples R China.

PLASMA SOURCES SCIENCE & TECHNOLOGY, 2021; 30 (7):

Abstract

The effect of the pulse-off duration on the time evolution of the plasma and electrical parameters during the ignition phase in a pulsed capacitively ......

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