Ultralow Dissipation Mechanical Resonators for Quantum Optomechanics

Engelsen, NJ; Fedorov, SA; Ghadimi, AH; Bereyhi, MJ; Beccari, A; Schilling, R; Wilson, DJ; Kippenberg, TJ

Wilson, DJ (reprint author), IBM Res Zurich, Saumerstr 4, CH-8803 Ruschlikon, Switzerland.

2019 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2019; ():

Abstract

We demonstrate dissipation dilution engineering techniques for ultralow dissipation mechanical resonators. The Si3N4 nanobeams show quality factors (Q......

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