Miniaturization of CMOS

Radamson, HH; He, XB; Zhang, QZ; Liu, JB; Cui, HS; Xiang, JJ; Kong, ZZ; Xiong, WJ; Li, JJ; Gao, JF; Yang, H; Gu, SH; Zhao, XW; Du, Y; Yu, JH; Wang, GL

Radamson, HH; Wang, GL (reprint author), Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China.; Radamson, HH; Wang, GL (reprint author), Univ Chinese Acad Sci, Microelect Inst, Beijing 100049,

MICROMACHINES, 2019; 10 (5):

Abstract

When the international technology roadmap of semiconductors (ITRS) started almost five decades ago, the metal oxide effect transistor (MOSFET) as unit......

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