Understanding Pore Formation in ALD Alumina Overcoats

George, C; Littlewood, P; Stair, PC

Stair, PC (corresponding author), Northwestern Univ, Dept Chem, Evanston, IL 60208 USA.

ACS APPLIED MATERIALS & INTERFACES, 2020; 12 (18): 20331

Abstract

AlOx thin films deposited by atomic layer deposition (ALD) have previously been used to increase both stability and selectivity of supported palladium......

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