Tribological behavior of WC/WCN/CNx coatings deposited by high power impulse magnetron sputtering

Flores-Cova, L; Broitman, E; Jimenez, O; Flores-Martinez, M

Flores-Cova, L (通讯作者)，Univ Guadalajara, Dept Ingn Proyectos, CUCEI, Jose Guadalupe Zuno 48, Zapopan 45150, Jalisco, Mexico.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2023; 41 (3):

Abstract

Carbon-based coatings (WC/WCN/CNx) were deposited by high power impulse magnetron sputtering and direct current magnetron sputtering on the AISI 52100......

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